Axcelis Technologies
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Axcelis Technologies (ACLS) investor relations material

Axcelis Technologies Q4 2025 earnings summary

Complete event summary combining all related documents: earnings call transcript, report, and slide presentation.
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Q4 2025 earnings summary17 Feb, 2026

Executive summary

  • Q4 2025 revenue reached $238 million, with non-GAAP EPS of $1.49 and GAAP EPS of $1.10, both exceeding outlook due to record CS&I revenue and favorable gross margin mix.

  • Full-year 2025 revenue was $839 million, with non-GAAP EPS of $4.88 and GAAP EPS of $3.80; CS&I revenue grew 14% year-over-year.

  • Bookings improved sequentially, led by power, general mature, and memory (notably DRAM), with a backlog of $457 million at year-end.

  • The pending merger with Veeco is progressing, with shareholder approval, regulatory clearance in several jurisdictions, and closing expected in the second half of 2026.

  • Mature process technology accounted for 88% of Q4 shipped system revenue, with power segment at 53%.

Financial highlights

  • Q4 2025 systems revenue was $156.5 million; CS&I revenue $81.9 million, with full-year CS&I revenue up 14% year-over-year.

  • Q4 GAAP gross margin was 47.0%, non-GAAP 47.3%; GAAP operating margin 15.2%, non-GAAP 21.1%.

  • Adjusted EBITDA for Q4 2025 was $54.7 million (22.9% margin); full-year Adjusted EBITDA was $176.7 million (21.1% margin).

  • Q4 free cash flow was -$9 million due to sales timing and $5 million in merger-related expenses; full-year free cash flow exceeded $100 million.

  • Cash, cash equivalents, and marketable securities at year-end ranged from $145.5 million to $557 million, with $374.3 million in cash and short-term investments.

Outlook and guidance

  • Q1 2026 revenue expected at $195 million, with non-GAAP gross margin at 41% and non-GAAP EPS at $0.71.

  • Full-year 2026 revenue anticipated to be flat versus 2025, with memory growth offsetting declines in power and general mature markets; gross margin expected in low-to-mid 40% range.

  • Revenue expected to be second-half weighted, driven by memory market recovery.

  • Tax rate for 2026 estimated at 15%.

  • Management anticipates continued momentum in the Memory market and ongoing mixed demand in Power and General Mature markets.

Elaborate on Veeco merger's strategic benefits
What drives mixed demand in Power/Mature markets?
Detail capital return strategy for 2026
What's the remaining 150mm to 200mm upgrade potential?
How does memory growth offset other market declines?
When will utilization rates drive new power/GM orders?
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Q1 20265 May, 2026
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